The regular cleaning of a cleanroom is an important factor to maintain the needed air purity class. However, the cleaning of the machines which are located in a cleanroom is often being ignored. But the maintenance cleaning of the machines should be included in the cleaning plan to ensure the necessary purity of the machine and the associated process. In addition, it is urgently necessary for the manufacturer of such a machine to process only cleaned individual parts and assemblies and thus to complete the machine. The opportunity of cleaning individual parts is often used. Cleaning in ultrasonic bath is standard nowadays.